Fabian Pieck
I'm a staff scientist in the theoretical chemistry group at Leipzig University. My research is focusing on modeling chemical reactions within the (area-selective) atomic layer deposition.
Session
08-14
14:45
15min
RandomSequentialAdsorption.jl - Modeling Adsorbate Packing in Area-Selective Atomic Layer Deposition
Fabian Pieck
A precise material deposition is nowadays a key component of any microchip production. A prominent deposition technique offering the required level of control is area-selective atomic layer deposition. To improve this technique the chemical reactions of the adsorbates at the substrate surface are modeled. Here, the presented random sequential adsorption approach targets to model the adsorption and packing of the first adsorbate layer. Implementation of the key assumptions as well as first results are part of this contribution.
General
Room 4